Electron Beam Evaporation System
Electron Beam Evaporation System
SPECIFICATIONS OF THERMAL EVAPORATION WITH ELECTRON BEAM GUN & POWER SUPPLY
- Vacuum Chamber
- Evaporation Source Holder
- Source Shutter
- LT & HT Electrodes with Power Supply
- Substrate Holder, Heater and Rotation Mechanism
- Electron Beam Gun with Power Supply
- High Vacuum Pumping System
- Vacuum Valves
- Vacuum Measuring Gauges
- Control Console and Frame